物質(zhì)在納米尺度下表現(xiàn)出的奇異現(xiàn)象和規(guī)律將改變相關(guān)理論的現(xiàn)有框架,使人們對物質(zhì)世的認(rèn)識進(jìn)入到嶄新的階段。用微納米加工方法對微納米材料、器件等進(jìn)行微結(jié)構(gòu)表征、操縱、控制、加工等,測量其力、熱、光、電、磁等低維物理特性,開展相關(guān)基礎(chǔ)理論、方法研究和設(shè)備改造、研制,對納米科技的發(fā)展具有重要的意義。本書主要包括掃描電子顯微學(xué)、透射電子顯微學(xué)、聚焦離子束和電子束納米加工技術(shù)、氦離子顯微學(xué)等的基礎(chǔ)理論,通過一些典型的應(yīng)用介紹如何運(yùn)用這些方法實施對材料及其結(jié)構(gòu)的表征、加工等。
王榮明,北京科技大學(xué)教授,數(shù)理學(xué)院院長 。中國材料研究學(xué)會青年委員會第四屆理事會理事,中國金屬學(xué)會材料科學(xué)分會第五屆理事會理事,中國航空學(xué)會第六屆材料工程專業(yè)分會委員。
1 Electron/Ion Optics
1.1 General ray diagram of TEM
1.2 Electron sources
1.3 Optics
1.4 Detectors
1.5 Ion optics
2 Scanning Electron Microscopy
2.1 Introduction
2.2 Fundamentals of the SEM
2.3 Analytical capabilities of the SEM
3 Transmission Electron Microscopy
3.1 Introduction
3.2 High-resolution transmission electron microscopy imaging
3.3 A new approach to image analysis in HRTEM
3.4 Focal series reconstruction
3.5 Convergent beam electron di?raction
3.6 Lorentz electron microscopy
3.7 Electron holography
4 Scanning Transmission Electron Microscopy (STEM)
4.1 Introduction
4.2 The Principle of reciprocity
4.3 Principle of STEM imaging
4.4 HAADF imaging
4.5 ABF imaging
4.6 Scanning Moir?e fringe imaging
4.7 Application on micro-area analysis
4.8 Discussion and conclusion
5 Spectroscopy
5.1 Introduction
5.2 Principle of EDS and EELS
5.3 EDS+TEM and EDS+STEM
5.4 EELS-TEM
5.5 EELS-STEM and applications
5.6 Spectrum imaging
6 Aberration Corrected Transmission Electron Microscopy and Its
Applications
6.1 Basics of aberration correction
6.2 Aberration corrected electron microscopy
6.3 Applications of aberration corrected electron microscopy
7 In Situ TEM: Theory and Applications
7.1 In situ TEM observation of deformation-induced structural evolution
at atomic resolution for strained materials
7.2 In situ TEM investigations on Ga/In ˉlled nanotubes
7.3 In situ TEM electrical measurements
7.4 Several advanced electron microscopy methods and their
applications on materials science
8 Helium Ion Microscopy
8.1 Introduction
8.2 Principles¢
8.3 Imaging techniques
8.4 Applications
8.5 Current/Future developments
8.6 Conclusion